2018-11-17 Welcome guest,  Sign In  |  Sign Up
Chin. Opt. Lett.
 Home  List of Issues    Issue 10 , Vol. 16 , 2018    10.3788/COL201816.101201

Absolute surface form measurement of flat optics based on oblique incidence method
Longbo Xu1, Shijie Liu2, Rihong Zhu1, You Zhou2, and Jie Chen2
1 [Nanjing University of Science and Technology], Nanjing 21 0094, China
2 [Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences], Shanghai 2 01800, China

Chin. Opt. Lett., 2018, 16(10): pp.101201

Topic:Instrumentation, measurement and metrology
Keywords(OCIS Code): 120.6650  220.4840  240.5450  240.6700  

In this Letter, a test method based on oblique incidence is practically implemented in the interferometric measurement process. Three sets of wavefront data are achieved through cavity interference measurement with a Fizeau interferometer and one oblique incidence measurement. An iterative algorithm is applied to retrieve the absolute surface shape of the test flat. By adding two sets of measurements, the absolute surface error of the interferometer’s reference flat can be obtained. The new method can not only calibrate the reference flat error of interferometer, but also provide the absolute measurement method for high precision optical components applied in high power laser systems.

Copyright: © 2003-2012 . This is an open-access article distributed under the terms of the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited.

 View PDF (689 KB)


Posted online:2018/9/19

Get Citation: Longbo Xu, Shijie Liu, Rihong Zhu, You Zhou, and Jie Chen, "Absolute surface form measurement of flat optics based on oblique incidence method," Chin. Opt. Lett. 16(10), 101201(2018)

Note: This work was supported by the National Natural Science Foundation of China (Nos. 11602280 and 61705246).


1. Z. Zhou, H. Shang, Y. Sui, Y. Sui, and H. Yang, Chin. Opt. Lett. 16, 032201 (2018).

2. L. Kong, L. Zhang, L. Zhu, H. Bao, Y. Guo, X. Rao, L. Zhong, and C. Rao, Chin. Opt. Lett. 14, 100102 (2016).

3. M. Yang, T. Li, C. Wang, J. Yang, W. Yang, T. Yi, S. Liu, S. Jiang, and Y. Ding, Chin. Opt. Lett. 14, 101402 (2016).

4. G. Schulz, and J. Schwider, Appl. Opt. 6, 1077 (1967).

5. G. Schulz, J. Schwider, C. Hiller, and B. Kicker, Appl. Opt. 10, 929 (1971).

6. B. S. Fritz, Opt. Eng. 23, 379 (1984).

7. C. Ai, and J. C. Wyant, Proc. SPIE 1776, 73 (1992).

8. C. Ai, and J. C. Wyant, Appl. Opt. 32, 4698 (1993).

9. M. F. Küchel, Optik 112, 381 (2001).

10. U. Griesmann, Q. Wang, and J. Soons, Opt. Eng. 46, 093601 (2007).

11. M. Vannoni, and G. Molesini, Opt. Express 15, 6809 (2007).

12. M. Vannoni, and G. Molesini, Opt. Express 16, 340 (2008).

13. M. Vannoni, A. Sordini, and G. Molesini, Opt. Express 51, 081501 (2012).

14. M. Vannoni, Opt. Express 22, 3538 (2014).

15. W. Lin, Y. He, L. Song, H. Luo, and J. Wang, Appl. Opt. 53, 3370 (2014).

16. Z. Han, L. Chen, T. Wulan, and R. Zhu, Optik 124, 3781 (2013).

17. L. Xu, Y. Zhou, R. Zhu, S. Liu, and W. Zheng, Opt. Precis. Eng. 24, 3027 (2016).

18. S. Liu, C. Jin, and Y. Zhou, Proc. SPIE 9525, 952536 (2015).

Save this article's abstract as
Copyright©2018 Chinese Optics Letters 沪ICP备15018463号-7 公安备案沪公网安备 31011402005522号