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Chin. Opt. Lett.
 Home  List of Issues    Issue 09 , Vol. 16 , 2018    10.3788/COL201816.090501

Effects of mask-alignment error on point spread function for multi-level Fresnel diffractive lenses
Dun Liu1;2, Shibin Wu1, Wei Yang1, Lihua Wang1, Bin Fan1, and Fan Wu1
1 [Institute of Optics and Electronics, Chinese Academy of Sciences], Chengdu 61 0209, China
2 [University of Chinese Academy of Sciences], Beijing 100049, China

Chin. Opt. Lett., 2018, 16(09): pp.090501

Topic:Diffraction and gratings
Keywords(OCIS Code): 050.1380  050.1965  110.3000  120.4610  

The full aperture complex amplitude transmittance function of a multi-level diffraction lens with mask-alignment errors was derived based on scalar diffraction theory. The point spread function (PSF) was calculated by the Kirchhoff diffraction integral. It is found that the radius of the Airy disk increases with the increase of the error in the direction of misalignment, and the image center shifts along the direction of misalignment. A four-level diffractive lens with a diameter of 80 mm was fabricated, and its PSF and diffraction efficiency of +1st order were calculated and measured. The distribution of PSF is consistent with the calculated results, and the tested diffraction efficiency is slightly smaller than the calculated value; the relative error is 5.71%.

Copyright: © 2003-2012 . This is an open-access article distributed under the terms of the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited.

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Posted online:2018/8/31

Get Citation: Dun Liu, Shibin Wu, Wei Yang, Lihua Wang, Bin Fan, and Fan Wu, "Effects of mask-alignment error on point spread function for multi-level Fresnel diffractive lenses," Chin. Opt. Lett. 16(09), 090501(2018)

Note: This work was supported by the National Key R&D Program of China (No. 2016YFB0500200) and the Key Program of Chinese Academy of Sciences (No. YA16K010).


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