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Chin. Opt. Lett.
 Home  List of Issues    Issue 08 , Vol. 16 , 2018    10.3788/COL201816.081203

Model-based adaptive non-null interferometry for freeform surface metrology
Lei Zhang1, Sheng Zhou1, Dong Li2, Jingsong Li1, and Benli Yu1
1 Key Laboratory of Opto-Electronic Information Acquisition and Manipulation, Ministry of Education, [Anhui University], Hefei 230601 , China
2 [Research Center of Laser Fusion, China Academy of Engineering Physics], Mianyang 62 1900, China

Chin. Opt. Lett., 2018, 16(08): pp.081203

Topic:Instrumentation, measurement and metrology
Keywords(OCIS Code): 120.3180  220.1250  

A model-based adaptive non-null interferometry (MANI) is proposed for steep optical freeform surfaces in situ testing. The deformable mirror (DM) affording the flexible compensation is monitored with the beam in the interferometer by a wavefront sensor. The residual wavefront aberration in the non-null interferogram is eliminated by the multi-configuration ray tracing algorithm based on the system model, especially the DM surface model. The final figure error can be extracted together with the surface misalignment aberration correction. Experiments proving the feasibility of the MANI are shown.

Copyright: © 2003-2012 . This is an open-access article distributed under the terms of the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited.

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Posted online:2018/7/27

Get Citation: Lei Zhang, Sheng Zhou, Dong Li, Jingsong Li, and Benli Yu, "Model-based adaptive non-null interferometry for freeform surface metrology," Chin. Opt. Lett. 16(08), 081203(2018)

Note: This work was supported by the National Natural Science Foundation of China (No. 61705002), the Opening Project of Key Laboratory of Astronomical Optics & Technology in Nanjing Institute of Astronomical Optics & Technology of Chinese Academy of Sciences (No. CAS-KLAOT-KF201704), and the Doctoral Start-up Foundation of Anhui University (No. J01003208). Also, this work was partially supported by the National Natural Science Foundation of China (No. 61675005) and the National Key R&D Program of China (No. 2016YFC0301900).


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