2018-12-11 Welcome guest,  Sign In  |  Sign Up
Chin. Opt. Lett.
 Home  List of Issues    Issue 03 , Vol. 16 , 2018    10.3788/COL201816.031401


Femtosecond laser highly-efficient plane processing based on an axicon-generated donut-shaped beam
Zhi Luo, Cong Wang, Xinran Dong, and Ji’an Duan
State Key Laboratory of High Performance and Complex Manufacturing, [Central South University], Changsha 410083, China

Chin. Opt. Lett., 2018, 16(03): pp.031401

DOI:10.3788/COL201816.031401
Topic:Lasers and laser optics
Keywords(OCIS Code): 140.7090  140.3300  240.5450  

Abstract
A simple technique is proposed for highly-efficient plane processing fully based on femtosecond laser beam shaping. The laser intensity distribution is transformed from a Gaussian to a donut shape. As the donut-shaped focus seems like a flat top from the side view, a plane with a high level of flatness is obtained directly by scanning once. By applying it to polishing experiments, the surface roughness can be improved significantly. The influence of scanning speed, laser pulse energy, and scanning times on the roughness is also discussed. Moreover, the scanning width can be flexibly controlled in a wide range.

Copyright: © 2003-2012 . This is an open-access article distributed under the terms of the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited.

 View PDF (719 KB)

Share:


Received:2017/9/20
Accepted:2018/1/4
Posted online:2018/3/2

Get Citation: Zhi Luo, Cong Wang, Xinran Dong, and Ji’an Duan, "Femtosecond laser highly-efficient plane processing based on an axicon-generated donut-shaped beam," Chin. Opt. Lett. 16(03), 031401(2018)

Note: This work was supported by the National Key R&D Program of China (No. 2017YFB1104300), the National Natural Science Foundation of China (NSFC) (No. 51505505), the Hunan Provincial Innovation Foundation for Postgraduate (No. CX2015B044), the Natural Science Foundation of Hunan Province (No. 2016JJ3147), the Open Research Fund of Key Laboratory of High Performance and Complex Manufacturing, Central South University (No. KFKT2015-09).



References

1. J. H. McLeod, J. Opt. Soc. Am. 44, 592 (1954).

2. C. B. Burckhardt, H. Hoffmann, and P. A. Grandchamp, J. Acoust. Soc. Am. 54, 1628 (1973).

3. Z. Jaroszewicz, A. Burvall, and A. T. Friberg, Opt. Photon. News 16, 34 (2005).

4. Z. Luo, J. Duan, and C. Guo, Opt. Lett. 42, 2358 (2017).

5. J. Zheng, B. Yao, Y. Yang, M. Lei, P. Gao, R. Li, S. Yan, D. Dan, and T. Ye, Chin. Opt. Lett. 11, 112601 (2013).

6. R. Arimoto, C. Saloma, T. Tanaka, and S. Kawata, Appl. Opt. 31, 6653 (1992).

7. S. M. Perinchery, A. Shinde, C. Y. Fu, X. J. J. Hong, M. Baskaran, T. Aung, and V. M. Murukeshan, Sci. Rep. 6, 30844 (2016).

8. Z. Zhai, Q. Lv, X. Wang, L. Yang, Z. Xu, and H. Tao, in 4th International Conference on Photonics, Optics and Laser Technology , IEEE (2016), p.?1.

9. D. Lorenser, C. C. Singe, A. Curatolo, and D. D. Sampson, Opt. Lett. 39, 548 (2014).

10. J. Arlt, V. Garces-Chavez, W. Sibbett, and K. Dholakia, Opt. Commun. 197, 239 (2001).

11. S. Cabrini, C. Liberale, D. Cojoc, A. Carpentiero, M. Prasciolu, S. Mora, V. Degiorgio, F. De Angelis, and E. Di Fabrizio, Microelectron. Eng. 83, 804 (2006).

12. L. Zhao, F. Wang, L. Jiang, Y. Lu, W. Zhao, J. Xie, and X. Li, Chin. Opt. Lett. 13, 041405 (2015).

13. Y. Yu, L. Jiang, Q. Cao, B. Xia, Q. Wang, and Y. Lu, Opt. Express 23, 32728 (2015).

14. X. Dong, Z. Xie, Y. Song, K. Yin, D. Chu, and J. Duan, Chin. Opt. Lett. 15, 090602 (2017).

15. D. Chu, K. Yin, X. Dong, Z. Luo, Y. Song, and J. Duan, Chin. Opt. Lett. 16, 11401 (2018).

16. Q. Wang, L. Jiang, J. Sun, C. Pan, W. Han, G. Wang, H. Zhang, C. P. Grigoropoulos, and Y. Lu, Photon. Res. 5, 488 (2017).

17. Y. Ju, C. Liu, Y. Liao, Y. Liu, L. Zhang, Y. Shen, D. Chen, and Y. Cheng, Chin. Opt. Lett. 11, 072201 (2013).

18. H. Xia, J. Wang, Y. Tian, Q. D. Chen, X. B. Du, Y. L. Zhang, Y. He, and H. B. Sun, Adv. Mater. 22, 3204 (2010).

19. Y. C. Guan, G. K. L. Ng, H. Y. Zheng, M. H. Hong, X. Hong, and Z. Zhang, Appl. Surf. Sci. 270, 526 (2013).

20. A. V. Rode, D. Freeman, K. G. H. Baldwin, A. Wain, O. Uteza, and P. Delaporte, Appl. Phys. A-Mater. Sci. Process. 93, 135 (2008).

21. Z. Luo, C. Wang, J. A. Duan, X. Sun, Y. Hu, and K. Yin, Appl. Opt. 54, 3943 (2015).

22. T. L. Perry, D. Werschmoeller, X. Li, F. E. Pfefferkorn, and N. A. Duffie, J. Manuf. Process. 11, 74 (2009).

23. C. Nüsser, I. Wehrmann, and E. Willenborg, Phys. Procedia 12, 462 (2011).

24. T. L. Perry, D. Werschmoeller, X. Li, F. E. Pfefferkorn, and N. A. Duffie, J. Manuf. Sci. Eng. 131, 031002 (2009).


Save this article's abstract as
Copyright©2018 Chinese Optics Letters 沪ICP备15018463号-7 公安备案沪公网安备 31011402005522号