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Chin. Opt. Lett.
 Home  List of Issues    Issue 03 , Vol. 16 , 2018    10.3788/COL201816.031201

Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and three-dimensional shape
Xiangjun Dai1;2, Tianyu Yuan1, Hanyang Jiang2, Xinxing Shao2, Meiling Dai2, Hai Yun1, Fujun Yang2, and Xiaoyuan He2
1 School of Transportation and Vehicle Engineering, [Shandong University of Technology], Zibo 255049, China
2 Department of Engineering Mechanics, [Southeast University], Nanjing 2 10096, China

Chin. Opt. Lett., 2018, 16(03): pp.031201

Topic:Instrumentation, measurement and metrology
Keywords(OCIS Code): 120.3180  120.6650  120.4290  

This Letter demonstrates a novel lateral shear interferometer system for simultaneous measurement of three-dimensional (3D) shape and thickness of transparent objects. Multi-frequency fringe patterns can be created by tilting mirrors at different inclination angles. With a single camera, the multi-frequency fringes are recorded in one image. The phase-shift of the fringes can be generated synchronously only by moving a plane-parallel plate along an in-plane parallel direction. According to the feature of transparent materials, the thickness and 3D shape can be reconstructed simultaneously based on the relationship between the in-plane displacement and their characteristics. The experiment was conducted on a thin transparent film subjected to a shearing force, which verifies the feasibility of the proposed system.

Copyright: © 2003-2012 . This is an open-access article distributed under the terms of the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited.

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Posted online:2018/3/9

Get Citation: Xiangjun Dai, Tianyu Yuan, Hanyang Jiang, Xinxing Shao, Meiling Dai, Hai Yun, Fujun Yang, and Xiaoyuan He, "Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and three-dimensional shape," Chin. Opt. Lett. 16(03), 031201(2018)

Note: This work was supported by the National Natural Science Foundation of China (Nos. 11672167, 11602056, 11472081, and 11532005).


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