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Chin. Opt. Lett.
 Home  List of Issues    Issue 10 , Vol. 15 , 2017    10.3788/COL201715.101203


Design of a grating by a joint optimization method for a phase-shifting point diffraction interferometer
Meng Zheng, Ke Liu, Lihui Liu, and Yanqiu Li
Key Laboratory of Photoelectronic Imaging Technology and Systems, Ministry of Education of China, School of Optoelectronics, [Beijing Institute of Technology], Beijing 100081, China

Chin. Opt. Lett., 2017, 15(10): pp.101203

DOI:10.3788/COL201715.101203
Topic:Instrumentation, measurement and metrology
Keywords(OCIS Code): 120.3180  120.4640  260.1960  050.1950  

Abstract
A grating is an important element of a phase-shifting point diffraction interferometer, and the grating constant and duty cycle have a great impact on the interferometer, so the design of a grating becomes significant. In order to measure the projection objective with a numerical aperture of 0.2, we present a joint optimization method of a pinhole and grating based on scalar diffraction and the finite difference time domain method. The grating constant and the film thickness are selected, and the duty cycle of the grating is optimized. The results show that in the grating processing the material chromium is adopted, the thickness is 200 nm, and the grating constant is 15 μm. When the duty cycle is 55%, the interference fringe contrast is the greatest. The feasibility of the design result is further verified by experiment.

Copyright: © 2003-2012 . This is an open-access article distributed under the terms of the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited.

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Received:2017/5/8
Accepted:2017/7/14
Posted online:2017/8/21

Get Citation: Meng Zheng, Ke Liu, Lihui Liu, and Yanqiu Li, "Design of a grating by a joint optimization method for a phase-shifting point diffraction interferometer," Chin. Opt. Lett. 15(10), 101203(2017)

Note: This work was supported by the Major Scientific Instrument Development Project of the National Natural Science Foundation of China (No. 11627808), the National Natural Science Foundation of China (No. 61675026), and the National Science and Technology.



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