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Chin. Opt. Lett.
 Home  List of Issues    Issue 10 , Vol. 15 , 2017    10.3788/COL201715.100501


Reducing the stray light of holographic gratings by shifting the substrate a short distance in the direction parallel or perpendicular to the exposure interference fringes
Donghan Ma, Lijiang Zeng
Department of Precision Instrument, State Key Laboratory of Precision Measurement Technology and Instruments, [Tsinghua University], Beijing 100084, China

Chin. Opt. Lett., 2017, 15(10): pp.100501

DOI:10.3788/COL201715.100501
Topic:Diffraction and gratings
Keywords(OCIS Code): 050.1950  050.2770  290.2648  290.5880  

Abstract
This research proposes a simple and practical method to make low-stray-light gratings, where the substrate shifts about a 1 mm distance in the direction parallel or perpendicular to the exposure interference fringes. When the substrate shifts, a reference grating next to the substrate is used to adjust in real time the phase of the exposure interference fringes relative to the substrate. Shifting eliminates the exposure defects and therefore decreases the stray light of gratings. Several gratings are successfully made by using this method, which have straighter grooves, smoother surfaces, and lower stray light than gratings made in conventional interference lithography.

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Received:2017/4/20
Accepted:2017/6/6
Posted online:2017/6/30

Get Citation: Donghan Ma, Lijiang Zeng, "Reducing the stray light of holographic gratings by shifting the substrate a short distance in the direction parallel or perpendicular to the exposure interference fringes," Chin. Opt. Lett. 15(10), 100501(2017)

Note: This work was supported by the National Natural Science Foundation of China under Grant No. 51427805.



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