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Chin. Opt. Lett.
 Home  List of Issues    Issue 08 , Vol. 15 , 2017    10.3788/COL201715.081202

Dark-field detection method of shallow scratches on the super-smooth optical surface based on the technology of adaptive smoothing and morphological differencing
Chen Li1, Yongying Yang1, Huiting Chai1, Yihui Zhang1, Fan Wu1, Lin Zhou1, Kai Yan1, Jian Bai1, Yibing Shen1, Qiao Xu2, Hongzhen Jiang2, and Xu Liu2
1 State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, [Zhejiang University], Hangzhou 31 0027, China
2 [Research Center of Laser Fusion, CAEP], Mianyang 62 1900, China

Chin. Opt. Lett., 2017, 15(08): pp.081202

Topic:Instrumentation, measurement and metrology
Keywords(OCIS Code): 120.0120  120.4630  150.1835  150.3040  

There exist some shallow scratch defects on the super-smooth optical surface. Their detection has a low efficiency with the existing technologies. So a new detection method, dark-field detection of adaptive smoothing and morphological differencing (DFD-ASMD), is proposed. On one hand, the information of shallow scratches can be kept in dark-field images. On the other hand, their weak characteristics can be separated and protected from being overly reduced during the elimination of noise and background in the image. Experiments show the detection rate of shallow scratches is around 82%, and DFD-ASMD can lay a foundation for quality control of defects on the high-quality optical surface.

Copyright: © 2003-2012 . This is an open-access article distributed under the terms of the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited.

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Posted online:2017/6/13

Get Citation: Chen Li, Yongying Yang, Huiting Chai, Yihui Zhang, Fan Wu, Lin Zhou, Kai Yan, Jian Bai, Yibing Shen, Qiao Xu, Hongzhen Jiang, and Xu Liu, "Dark-field detection method of shallow scratches on the super-smooth optical surface based on the technology of adaptive smoothing and morphological differencing," Chin. Opt. Lett. 15(08), 081202(2017)

Note: This work was supported by the National Natural Science Foundation of China (Nos. 61627825 and 11275172) and the State Key Laboratory of Modern Optical Instrumentation Innovation Program (MOI) (No. MOI2015 B06).


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