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Chin. Opt. Lett.
 Home  List of Issues    Issue 08 , Vol. 07 , 2009    10.3788/COL20090708.0724

Research on the resolution of micro stereo lithography
Xiang Wang, Jijun He, Xiangtao Pei, Peng Shao, Jiaru Chu, Wenhao Huang
Department of Precision Machinery and Precision Instrumentation, [University of Science and Technology of China], Hefei 230026, China

Chin. Opt. Lett., 2009, 07(08): pp.724-727-4

Topic:Optical design and fabrication
Keywords(OCIS Code): 220.3740  220.4000  220.4610  

Micro stereo lithography is a kind of technology utilizing the solidified effect that photo curable polymer will appear under ultraviolet (UV) laser exposure. It is widely used in three-dimensional (3D) micro fabrication. We get the experimental values of a pair of UV laser curing coefficients, absorption coefficient and critical curing energy, of curable resin by fitting the calculation results of the Gaussian beam theory and experimental curing results. The theoretical relation between the curing unit’s shape and the exposure features of time and intensity of convergent Gaussian beam is presented. The calculation and experimental results of curing unit under different conditions agree well with each other. This research offers a steady base for further research about the improvement of resolution.

Copyright: © 2003-2012 . This is an open-access article distributed under the terms of the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited.

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Get Citation: Xiang Wang, Jijun He, Xiangtao Pei, Peng Shao, Jiaru Chu, Wenhao Huang, "Research on the resolution of micro stereo lithography," Chin. Opt. Lett. 07(08), 724-727-4(2009)

Note: This work was supported by the National “863” Program of China under Grant No. 2006AA04Z311.


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