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Chin. Opt. Lett.
 Home  List of Issues    Issue 08 , Vol. 07 , 2009    10.3788/COL20090708.0694

Theoretical modelling and experimental study of novel photothermal microactuators
Lihong Ma1;2, Dongxian Zhang1, Chao Liu1, Haijun Zhang1
1 State Key Laboratory of Modern Optical Instrumentation, [Zhejiang University], Hangzhou 310027, China
2 Information Optical Institute, [Zhejiang Normal University], Jinhua 321004, China

Chin. Opt. Lett., 2009, 07(08): pp.694-698-5

Topic:Instrumentation, measurement, and metrology
Keywords(OCIS Code): 120.6780  350.5340  220.4000  230.3990  140.3460  

We present a category of novel photothermal (PT) microactuators. Each microactuator consists of two PT arms that are jointed at the free end and connected to an anchor at the fixed end. When a laser beam irradiates one of the arms (called hot arm, and the other is cold arm), light energy is absorbed and converted into heat. The asymmetric thermal expansion of the hot and cold arms results in lateral deflection. Based on conduction heat transfer theory and heat dissipation mechanism, we study the PT effects and establish the theoretical model of PT expansion for the microactuators. The temperature distribution and the linear thermal expansion can be numerically calculated. The analytical solution provides an insight into the operation of the actuators and predicts the performance of the actuators with new designs. A symmetry microactuator and a microswitch as the prototypes have been fabricated and tested. The experimental results are in good agreement with the theoretical predictions and prove the feasibility of the novel PT microactuators.

Copyright: © 2003-2012 . This is an open-access article distributed under the terms of the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited.

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Get Citation: Lihong Ma, Dongxian Zhang, Chao Liu, Haijun Zhang, "Theoretical modelling and experimental study of novel photothermal microactuators," Chin. Opt. Lett. 07(08), 694-698-5(2009)

Note: This work was supported by the National “863” Program of China (No. 2006AA04Z237) and the National Natural Science Foundation of China (No. 50775205).


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