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Chin. Opt. Lett.
 Home  List of Issues    Issue 11 , Vol. 02 , 2004    Research on film thickness of conductive line formed by laser micro-fine cladding and flexibly direct writing technique


Research on film thickness of conductive line formed by laser micro-fine cladding and flexibly direct writing technique
Huiling Li1, Xiaoyan Zeng1, Huifen Li2, Xiangyou Li1, Yiqun Chen1
1State Key Laboratory of Laser Technology, Huazhong University of Science and Technology, Wuhan 4300742Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hung Hom, Kowloon, Hong Kong

Chin. Opt. Lett., 2004, 02(11): pp.654-654-

DOI:
Topic:Lasers and laser optics
Keywords(OCIS Code): 350.3390  310.1620  140.3510  

Abstract
The conventional technology could not fulfill the rapidly growing need for fine conductive lines for its inherent limits. Therefore, in this study laser micro-fine cladding and flexibly direct writing technique is used to obtain conductive lines with high precision and reliability. In the case of different substrates and parameters, film thickness will be different. Film thickness directly influences the reliability and stability of conductive lines with exception of quality and running speed. Therefore, we focus on developing the optimal parameters for the different substrates to achieve expected film thickness and make conductive lines have good performance and quality.

Copyright: © 2003-2012 . This is an open-access article distributed under the terms of the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited.

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Received:2004/4/8
Accepted:
Posted online:

Get Citation: Huiling Li, Xiaoyan Zeng, Huifen Li, Xiangyou Li, Yiqun Chen, "Research on film thickness of conductive line formed by laser micro-fine cladding and flexibly direct writing technique," Chin. Opt. Lett. 02(11), 654-654-(2004)

Note: This work was supported by the National Natural Science Foundation of China (No. 50075030) and the National "863" Project of China (No. 2001AA421290). H. Li's e-mail address is scape_lhl@sohu.com, and X. Zeng's e-mail address is xyzeng@public.wh.hb.cn.



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